{"title":"An Inertial Piezoelectric Hybrid Actuator With LargeAngular Velocity and High Resolution","authors":"Huilu Bao, Jianming Wen, Jijie Ma, Jiajia Zheng, Kangshang Chen","doi":"10.1109/3M-NANO.2018.8552211","DOIUrl":null,"url":null,"abstract":"An inertial piezoelectric actuator with large angular velocity and high resolution equipped with various combinations of asymmetrical clamping structures and a bias unit is presented. Two control types are constructed as types A and B. Simulation experiments are conducted to explore the angular displacement and velocity characteristics. The first-order natural frequency by simulation is 16.666 and 17.379 Hz for types A and B, respectively, which agrees with the experiment results of 13.828 and 14.141 Hz. Furthermore, for type A, compared with the characteristics of the actuator that has a sole asymmetrical clamping structure, angular velocity is improved to approximately 6.90 times from 18.88 mrad/s to 130.23 mrad/s at 50 V and 7 Hz. For type B, the resolution is enhanced to 2.85 times from 7.98 μrad to 2.80 μrad under a square signal of 20 V and 1 Hz and offset distance of −22 mm. Thus, type A can improve angular velocity and type B can enhance resolution.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"41 1","pages":"272-277"},"PeriodicalIF":0.0000,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2018.8552211","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
An inertial piezoelectric actuator with large angular velocity and high resolution equipped with various combinations of asymmetrical clamping structures and a bias unit is presented. Two control types are constructed as types A and B. Simulation experiments are conducted to explore the angular displacement and velocity characteristics. The first-order natural frequency by simulation is 16.666 and 17.379 Hz for types A and B, respectively, which agrees with the experiment results of 13.828 and 14.141 Hz. Furthermore, for type A, compared with the characteristics of the actuator that has a sole asymmetrical clamping structure, angular velocity is improved to approximately 6.90 times from 18.88 mrad/s to 130.23 mrad/s at 50 V and 7 Hz. For type B, the resolution is enhanced to 2.85 times from 7.98 μrad to 2.80 μrad under a square signal of 20 V and 1 Hz and offset distance of −22 mm. Thus, type A can improve angular velocity and type B can enhance resolution.