A. Royet, S. Kerdilès, P. Acosta Alba, C. Bonafos, V. Paillard, F. Cristiano, B. Curvers, K. Huet
{"title":"Numerical simulations of nanosecond laser annealing of Si nanoparticles for plasmonic structures","authors":"A. Royet, S. Kerdilès, P. Acosta Alba, C. Bonafos, V. Paillard, F. Cristiano, B. Curvers, K. Huet","doi":"10.1109/SISPAD.2019.8870529","DOIUrl":null,"url":null,"abstract":"This paper reports numerical simulations of nanosecond laser thermal annealing of plasmonic structures based on Si-nanoparticles embedded in a SiO2 matrix. From these simulations, we extracted guidelines for the structure design to be adopted. This study also investigates the expected laser annealing process window and the influence of nanoparticles coverage.","PeriodicalId":6755,"journal":{"name":"2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"2 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SISPAD.2019.8870529","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper reports numerical simulations of nanosecond laser thermal annealing of plasmonic structures based on Si-nanoparticles embedded in a SiO2 matrix. From these simulations, we extracted guidelines for the structure design to be adopted. This study also investigates the expected laser annealing process window and the influence of nanoparticles coverage.
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