Yanning Chen, Shuaipeng Wang, Haifeng Zhang, Dongyan Zhao, Z. Fu, Yidong Yuan, Yubo Wang
{"title":"Design of an accelerometer in inclination monitoring of power transmission pole","authors":"Yanning Chen, Shuaipeng Wang, Haifeng Zhang, Dongyan Zhao, Z. Fu, Yidong Yuan, Yubo Wang","doi":"10.1109/ICEPT47577.2019.245757","DOIUrl":null,"url":null,"abstract":"Accelerometers are some of the most familiar micro electronic mechanical system (MEMS) sensor. Accelerometers are used in many fields, such as vehicle braking, mobile phone, gauge check and so on. In this paper, we summarize how accelerometers sensors can be operated, and their working principle is presented, and then the fabrication process of the accelerometers sensors is presented. Then we conducted a preliminary test on the performance of the sensor and discuss the optimization scheme of manufacturing process.","PeriodicalId":6676,"journal":{"name":"2019 20th International Conference on Electronic Packaging Technology(ICEPT)","volume":"10 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 20th International Conference on Electronic Packaging Technology(ICEPT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEPT47577.2019.245757","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Accelerometers are some of the most familiar micro electronic mechanical system (MEMS) sensor. Accelerometers are used in many fields, such as vehicle braking, mobile phone, gauge check and so on. In this paper, we summarize how accelerometers sensors can be operated, and their working principle is presented, and then the fabrication process of the accelerometers sensors is presented. Then we conducted a preliminary test on the performance of the sensor and discuss the optimization scheme of manufacturing process.
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