低温无压烧结大面积模具附件用双峰分布铜纳米颗粒铜膏体的优异烧结性能及其烧结机理

B. Hou, Hai-Jun Huang, Chunling Wang, Min-bo Zhou, Xin-Ping Zhang
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引用次数: 2

摘要

在电力电子和第三代半导体器件中,利用纳米铜颗粒(NP)浆料烧结无压低温Cu - Cu键合是一种很有前途的实现芯片连接的方法。然而,烧结铜膏体接头由于烧结组织不良和加工缺陷导致的可靠性低是一个具有挑战性和迫切需要解决的问题。采用一步法和还原性杂化溶剂制备了一种具有特殊包裹结构的双峰尺寸铜纳米粒子的新型铜浆料。在低温无压烧结的温和工艺条件下,烧结后的Cu膏体基体表现出相对致密的烧结组织,在280℃N2气氛下无压烧结10 min后,烧结后的大面积哑模接头抗剪强度高达29.5 MPa。接头的高强度主要归因于烧结组织中形成的大块铜相的强化作用。经过热老化试验,接头强度提高到40 MPa以上,具有优异的长期可靠性。双峰尺寸的Cu NP浆料采用相对温和的工艺烧结,烧结后的Cu - Cu接头具有较强的可靠性,在大功率电子封装领域具有广阔的应用前景。
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Superb sinterability of the Cu paste consisting of bimodal size distribution Cu nanoparticles for low-temperature and pressureless sintering of large-area die attachment and the sintering mechanism
Pressureless low temperature Cu–Cu bonding by sintering Cu nanoparticle (NP) paste is a promising method to realize die attachment in power electronics and third-generation semiconductor devices. However, the low reliability of sintered Cu paste joints due to poor sintering microstructure and processing defects is a challenging and urgent issue to be solved. The present work develops a novel Cu paste consisting of bimodal-size Cu NPs with special wrapping structure by means of a one-step method and use of reducing hybrid solvents. The sintered Cu paste matrix shows relatively dense sintered microstructure, despite using mild process condition of pressureless low temperature sintering, and sintered Cu– Cu joints in large-area dummy die attachment exhibit high shear strength up to 29.5 MPa after pressureless sintering at 280 °C for 10 min in N2 atmosphere. High strength of joints is ascribed to the strengthening effect of bulky Cu phase formed in sintered microstructures. After thermal aging tests, the strength of joints is increased to over 40 MPa, indicating exceptional long-term reliability. The bimodal size Cu NP paste is capable of sintering by adopting relatively mild process yet endows sintered Cu–Cu joints with robust reliability, thus exhibits a broad application prospect in the packaging field of high power electronics.
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