将SoC和LOC合并在一起

Zhihong Li, Xu Ji, Lu Wang, Jianzhong Xi
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引用次数: 1

摘要

本文提出了半导体集成片上系统(SoC)与片上实验室(LOC)相结合的前景。本文提出了一种将自组装生物系统、MEMS结构、微流控系统和CMOS电子电路集成在一起的新技术。利用这种方法,SoC中引入了更多的功能,同时LOC变得更加智能和可控。一个后cmos制造方法,满足要求,证明了这一想法。
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Merging SoC and LOC together
A promising combination of the semiconductor integrated system-on-a-chip (SoC) with the lab-on-a-chip (LOC) is brought in this paper. In this paper, we propose a new technology which enables monolithic integration of the self-assembled biological system, the MEMS structure, the microfluidic system, and CMOS electronic circuits together. Utilizing this approach, more functionality is introduced into the SoC, while the LOC becomes more intelligent and controllable. A post-CMOS fabrication approach that meets the requirements is demonstrated to validate the idea.
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