广泛可调的法布里-珀罗光学滤波器使用固定固定光束驱动器

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607831

J. Milne, J. Dell, A. Keating, L. Schuler, L. Faraone

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引用次数: 6

摘要

在基于mems的可调谐Fabry-Perot滤波器中实现了从1620 nm到2425 nm的宽光谱调谐。采用固定-固定梁作动器扩展了平行板作动器固有的调谐极限。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Widely tunable Fabry-Perot optical filter using fixed-fixed beam actuators

Wide spectral tuning from 1620 nm to 2425 nm has been achieved in a MEMS-based tunable Fabry-Perot filter. Fixed-fixed beam actuators were used to extend the tuning beyond the inherent limit of a parallel plate actuator.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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