利用弯矩驱动的纯抛物面变焦微镜

R. Hokari, K. Hane
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引用次数: 1

摘要

我们提出了一种通过在微镜的周长上施加弯矩来产生纯抛物曲面的方法。纯抛物面能无像差地聚焦光,是理想的镜面之一。在传统的方法中,变焦镜是通过在镜的中心部分施加一个分布载荷,在平行板电极上产生一个近似的球面或抛物面状表面。在本研究中,微镜仅通过在镜子的周长上施加弯矩来变形,以产生理想的抛物面。所提出的反射镜是由SOI硅片制成的。在0 ~ 215 V电压范围内,焦距从无穷远到24 mm,直径为400 mm的变焦镜与理想抛物面的偏差小于5 nm。
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A varifocal micromirror with pure parabolic surface using bending moment drive
We propose a method to generate a pure parabolic surface of varifocal micromirror by applying a bending moment to the circumference of the micromirror. Pure paraboloid can focus light without aberration a one of the ideal mirror surfaces. In the conventional method, varifocal mirror generates an approximate spherical surface or a paraboloid-like surface by applying a distributed load to the central part of the mirror with parallel plate electrodes. In this study, the micromirror is deformed only by applying a bending moment to the circumference of the mirror in order to generate an ideal paraboloid. The proposed mirror was fabricated from SOI wafer. The deviation of the varifocal mirror from the ideal paraboloid was measured to be smaller than 5 nm for the 400 mum diameter mirror with the focal lengths from the infinity to 24 mm at the voltages from 0 to 215 V.
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