{"title":"利用弯矩驱动的纯抛物面变焦微镜","authors":"R. Hokari, K. Hane","doi":"10.1109/OMEMS.2008.4607844","DOIUrl":null,"url":null,"abstract":"We propose a method to generate a pure parabolic surface of varifocal micromirror by applying a bending moment to the circumference of the micromirror. Pure paraboloid can focus light without aberration a one of the ideal mirror surfaces. In the conventional method, varifocal mirror generates an approximate spherical surface or a paraboloid-like surface by applying a distributed load to the central part of the mirror with parallel plate electrodes. In this study, the micromirror is deformed only by applying a bending moment to the circumference of the mirror in order to generate an ideal paraboloid. The proposed mirror was fabricated from SOI wafer. The deviation of the varifocal mirror from the ideal paraboloid was measured to be smaller than 5 nm for the 400 mum diameter mirror with the focal lengths from the infinity to 24 mm at the voltages from 0 to 215 V.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A varifocal micromirror with pure parabolic surface using bending moment drive\",\"authors\":\"R. Hokari, K. Hane\",\"doi\":\"10.1109/OMEMS.2008.4607844\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We propose a method to generate a pure parabolic surface of varifocal micromirror by applying a bending moment to the circumference of the micromirror. Pure paraboloid can focus light without aberration a one of the ideal mirror surfaces. In the conventional method, varifocal mirror generates an approximate spherical surface or a paraboloid-like surface by applying a distributed load to the central part of the mirror with parallel plate electrodes. In this study, the micromirror is deformed only by applying a bending moment to the circumference of the mirror in order to generate an ideal paraboloid. The proposed mirror was fabricated from SOI wafer. The deviation of the varifocal mirror from the ideal paraboloid was measured to be smaller than 5 nm for the 400 mum diameter mirror with the focal lengths from the infinity to 24 mm at the voltages from 0 to 215 V.\",\"PeriodicalId\":402931,\"journal\":{\"name\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2008.4607844\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607844","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A varifocal micromirror with pure parabolic surface using bending moment drive
We propose a method to generate a pure parabolic surface of varifocal micromirror by applying a bending moment to the circumference of the micromirror. Pure paraboloid can focus light without aberration a one of the ideal mirror surfaces. In the conventional method, varifocal mirror generates an approximate spherical surface or a paraboloid-like surface by applying a distributed load to the central part of the mirror with parallel plate electrodes. In this study, the micromirror is deformed only by applying a bending moment to the circumference of the mirror in order to generate an ideal paraboloid. The proposed mirror was fabricated from SOI wafer. The deviation of the varifocal mirror from the ideal paraboloid was measured to be smaller than 5 nm for the 400 mum diameter mirror with the focal lengths from the infinity to 24 mm at the voltages from 0 to 215 V.