Y. Kato, K. Mori, T. Mase, A. Takahashi, O. Imaki, R. Kaku
{"title":"4/ sp1次/4 MEMS光开关的研制","authors":"Y. Kato, K. Mori, T. Mase, A. Takahashi, O. Imaki, R. Kaku","doi":"10.1109/OMEMS.2000.879643","DOIUrl":null,"url":null,"abstract":"We present a design and experimental results of a 4/spl times/4 matrix optical switch that is suitable for passive alignment process, in which thick photoresist technology is utilized for the fabrication of tall vertical mirrors.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"69 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Development of 4/spl times/4 MEMS optical switch\",\"authors\":\"Y. Kato, K. Mori, T. Mase, A. Takahashi, O. Imaki, R. Kaku\",\"doi\":\"10.1109/OMEMS.2000.879643\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a design and experimental results of a 4/spl times/4 matrix optical switch that is suitable for passive alignment process, in which thick photoresist technology is utilized for the fabrication of tall vertical mirrors.\",\"PeriodicalId\":148819,\"journal\":{\"name\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"volume\":\"69 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-08-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2000.879643\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879643","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
We present a design and experimental results of a 4/spl times/4 matrix optical switch that is suitable for passive alignment process, in which thick photoresist technology is utilized for the fabrication of tall vertical mirrors.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
