集成在SOI上的Ge/SiGe调制器的演示研究进展

M. Rouifed, D. Marris-Morini, X. Le roux, P. Chaisakul, J. Frigerio, D. Chrastina, G. Isella, L. Vivien
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引用次数: 1

摘要

研究了集成在SOI波导上的Ge/SiGe QW调制器。展望了该调制器的良好性能,并报道了该调制器的制造进展。
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Advances towards the demonstration of a Ge/SiGe modulator integrated on SOI
We investigated Ge/SiGe QW modulators integrated on SOI waveguide. Promising performances are predicted and advances towards the fabrication of the modulators are reported.
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