大非共振位移并联板MEMS反射镜设计

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) Pub Date : 2000-08-21 DOI:10.1109/OMEMS.2000.879642

S. Bhalotra, J. Mansell, H. L. Kung, David A. B. Miller

{"title":"大非共振位移并联板MEMS反射镜设计","authors":"S. Bhalotra, J. Mansell, H. L. Kung, David A. B. Miller","doi":"10.1109/OMEMS.2000.879642","DOIUrl":null,"url":null,"abstract":"We present an electrostatically actuated MEMS mirror with 65 /spl mu/m of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":"{\"title\":\"Parallel-plate MEMS mirror design for large on-resonance displacement\",\"authors\":\"S. Bhalotra, J. Mansell, H. L. Kung, David A. B. Miller\",\"doi\":\"10.1109/OMEMS.2000.879642\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present an electrostatically actuated MEMS mirror with 65 /spl mu/m of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.\",\"PeriodicalId\":148819,\"journal\":{\"name\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"volume\":\"57 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-08-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"10\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2000.879642\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879642","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 10

摘要

我们提出了一种位移为65 /spl mu/m的静电驱动MEMS反射镜。这种设计提供了一个2毫米方形的反射表面，易于制造，使其适用于广泛的应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Parallel-plate MEMS mirror design for large on-resonance displacement

We present an electrostatically actuated MEMS mirror with 65 /spl mu/m of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.

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2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)

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