高分辨率集成硅微流控法布里-珀罗折光计

Raphael St-Gelais, Jonathan Masson, Yves-Alain Peter
{"title":"高分辨率集成硅微流控法布里-珀罗折光计","authors":"Raphael St-Gelais, Jonathan Masson, Yves-Alain Peter","doi":"10.1109/OMEMS.2008.4607806","DOIUrl":null,"url":null,"abstract":"We present a high resolution, robust and low cost integrated refractometer for microfluidic systems. The device is made of two Bragg reflectors vertically etched in silicon to form an in-plane Fabry-Perot filter. Liquids are injected in the cavity through a microfluidic channel and the variation of the refractive index induces a shift of the resonance wavelength. A sensitivity of 920 nm/RIU (refractive index units) and a resolution of less than 10-3 are obtained and are in good agreement with optical simulations. This resolution is, to our knowledge, the lowest ever reported for an integrated microfluidic Fabry-Perot refractometer.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"High resolution integrated microfluidic Fabry-Perot refractometer in silicon\",\"authors\":\"Raphael St-Gelais, Jonathan Masson, Yves-Alain Peter\",\"doi\":\"10.1109/OMEMS.2008.4607806\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a high resolution, robust and low cost integrated refractometer for microfluidic systems. The device is made of two Bragg reflectors vertically etched in silicon to form an in-plane Fabry-Perot filter. Liquids are injected in the cavity through a microfluidic channel and the variation of the refractive index induces a shift of the resonance wavelength. A sensitivity of 920 nm/RIU (refractive index units) and a resolution of less than 10-3 are obtained and are in good agreement with optical simulations. This resolution is, to our knowledge, the lowest ever reported for an integrated microfluidic Fabry-Perot refractometer.\",\"PeriodicalId\":402931,\"journal\":{\"name\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2008.4607806\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607806","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

我们提出了一种用于微流体系统的高分辨率、鲁棒性和低成本的集成折射计。该装置由两个垂直蚀刻在硅上的布拉格反射器组成,形成一个平面内的法布里-珀罗滤波器。液体通过微流体通道注入腔内,折射率的变化引起共振波长的移位。获得了920 nm/RIU(折射率单位)的灵敏度和小于10-3的分辨率,与光学模拟结果吻合较好。据我们所知,这是迄今为止报道的集成微流体法布里-珀罗折射仪的最低分辨率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
High resolution integrated microfluidic Fabry-Perot refractometer in silicon
We present a high resolution, robust and low cost integrated refractometer for microfluidic systems. The device is made of two Bragg reflectors vertically etched in silicon to form an in-plane Fabry-Perot filter. Liquids are injected in the cavity through a microfluidic channel and the variation of the refractive index induces a shift of the resonance wavelength. A sensitivity of 920 nm/RIU (refractive index units) and a resolution of less than 10-3 are obtained and are in good agreement with optical simulations. This resolution is, to our knowledge, the lowest ever reported for an integrated microfluidic Fabry-Perot refractometer.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Optical add/drop filter based on dual curved photonic crystal resonator MEMS based dual-axes confocal clinical endoscope for real time in vivo imaging Widely tunable Fabry-Perot optical filter using fixed-fixed beam actuators A varifocal micromirror with pure parabolic surface using bending moment drive Stabilization of temperature characteristics of micromirror for low-voltage driving using thin film torsion bar of tensile poly-Si
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1