高分辨率集成硅微流控法布里-珀罗折光计

Raphael St-Gelais, Jonathan Masson, Yves-Alain Peter
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引用次数: 2

摘要

我们提出了一种用于微流体系统的高分辨率、鲁棒性和低成本的集成折射计。该装置由两个垂直蚀刻在硅上的布拉格反射器组成,形成一个平面内的法布里-珀罗滤波器。液体通过微流体通道注入腔内,折射率的变化引起共振波长的移位。获得了920 nm/RIU(折射率单位)的灵敏度和小于10-3的分辨率,与光学模拟结果吻合较好。据我们所知,这是迄今为止报道的集成微流体法布里-珀罗折射仪的最低分辨率。
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High resolution integrated microfluidic Fabry-Perot refractometer in silicon
We present a high resolution, robust and low cost integrated refractometer for microfluidic systems. The device is made of two Bragg reflectors vertically etched in silicon to form an in-plane Fabry-Perot filter. Liquids are injected in the cavity through a microfluidic channel and the variation of the refractive index induces a shift of the resonance wavelength. A sensitivity of 920 nm/RIU (refractive index units) and a resolution of less than 10-3 are obtained and are in good agreement with optical simulations. This resolution is, to our knowledge, the lowest ever reported for an integrated microfluidic Fabry-Perot refractometer.
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