自屏蔽:hvic高压互连新技术

T. Fujihira, Y. Yano, S. Obinata, N. Kumagai, K. Sakurai
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引用次数: 16

摘要

提出了一种新的、经济高效的高压互联技术——自屏蔽技术。自屏蔽技术仅利用高压器件本身的pn结结构,避免了上覆互连电位对高压器件击穿电压降低的影响。即使实现1000 V以上的超高压集成电路,也不需要额外的屏蔽结构。介绍了自屏蔽式1200v移电平器的设计思想和器件结构,并给出了其工作的实验结果。
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Self-shielding: new high-voltage inter-connection technique for HVICs
A new, cost-effective, high-voltage inter-connection technique for HVICs, named Self-Shielding, is proposed. To avoid the lowering of breakdown voltage of high-voltage devices affected by the electric potential of overlying interconnections, self-shielding technique utilizes only the native PN-junction structures of high-voltage devices themselves. No additional shielding structure is required even to realize a very high-voltage IC above 1000 V. Design concept and device structures are presented together with the experimental results on the operation of self-shielded 1200 V level-shifters.
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