基于半导体薄膜的气体传感器研究进展

G. Sberveglieri, C. Baratto, E. Comini, G. Faglia, P. Nelli, L. Dori
{"title":"基于半导体薄膜的气体传感器研究进展","authors":"G. Sberveglieri, C. Baratto, E. Comini, G. Faglia, P. Nelli, L. Dori","doi":"10.1109/COMMAD.1998.791587","DOIUrl":null,"url":null,"abstract":"In this paper we review the electrical properties of semiconducting layers based on metal oxide thin films used for monitoring environmental gases and examine some innovative technique to increase the sensor selectivity towards particular gases (pulsed temperature, use of UV irradiation). The sensing layers are deposited onto a micromachined silicon substrate, which is characterized by low power consumption and allowed the interface with the process electronics.","PeriodicalId":300064,"journal":{"name":"1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140)","volume":"144 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":"{\"title\":\"Recent progress on gas sensors based on semiconducting thin films\",\"authors\":\"G. Sberveglieri, C. Baratto, E. Comini, G. Faglia, P. Nelli, L. Dori\",\"doi\":\"10.1109/COMMAD.1998.791587\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper we review the electrical properties of semiconducting layers based on metal oxide thin films used for monitoring environmental gases and examine some innovative technique to increase the sensor selectivity towards particular gases (pulsed temperature, use of UV irradiation). The sensing layers are deposited onto a micromachined silicon substrate, which is characterized by low power consumption and allowed the interface with the process electronics.\",\"PeriodicalId\":300064,\"journal\":{\"name\":\"1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140)\",\"volume\":\"144 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-12-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"10\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/COMMAD.1998.791587\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.1998.791587","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 10

摘要

本文综述了用于环境气体监测的基于金属氧化物薄膜的半导体层的电学特性,并研究了一些创新技术,以提高传感器对特定气体的选择性(脉冲温度,使用紫外线照射)。传感层沉积在微机械硅衬底上,其特点是低功耗,并允许与过程电子接口。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Recent progress on gas sensors based on semiconducting thin films
In this paper we review the electrical properties of semiconducting layers based on metal oxide thin films used for monitoring environmental gases and examine some innovative technique to increase the sensor selectivity towards particular gases (pulsed temperature, use of UV irradiation). The sensing layers are deposited onto a micromachined silicon substrate, which is characterized by low power consumption and allowed the interface with the process electronics.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
InGaP/GaAs resonant-tunneling transistor (RTT) Gallium arsenide technology for low-power, high performance processor cores Thick-film gas and humidity sensing array based on semiconducting metal oxides Compact modeling of high-frequency, small-dimension bipolar transistors Magneto-transport studies in AlGaN/GaN MODFETs
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1