{"title":"具有水平Bragg反射镜的新型单片光学滤波器","authors":"M. Datta, M. Pruessner, D. Kelly, R. Ghodssi","doi":"10.1109/ISDRS.2003.1272097","DOIUrl":null,"url":null,"abstract":"Theoretical analysis of an optical waveguide based horizontal resonant microcavity filter in InP, which is tunable within a broad wavelength range of 350 nm by MEMS electrostatic actuation is presented in this paper. The microcavity is formed between the input and output waveguides by fabricating monolithically integrated horizontal distributed Bragg reflector (DBR) mirrors. The length of the microcavity is varied by a total of 200 nm in steps of 10 nm to meet the Fabry-Perot resonant condition. Spectral response of the proposed resonant filter is numerically simulated using typical values for monolithic input beam size (3 /spl mu/m/spl times/1.5 /spl mu/m) and first-order mirror reflectivities.","PeriodicalId":369241,"journal":{"name":"International Semiconductor Device Research Symposium, 2003","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"MEMS-tunable novel monolithic optical filters in InP with horizontal Bragg mirrors\",\"authors\":\"M. Datta, M. Pruessner, D. Kelly, R. Ghodssi\",\"doi\":\"10.1109/ISDRS.2003.1272097\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Theoretical analysis of an optical waveguide based horizontal resonant microcavity filter in InP, which is tunable within a broad wavelength range of 350 nm by MEMS electrostatic actuation is presented in this paper. The microcavity is formed between the input and output waveguides by fabricating monolithically integrated horizontal distributed Bragg reflector (DBR) mirrors. The length of the microcavity is varied by a total of 200 nm in steps of 10 nm to meet the Fabry-Perot resonant condition. Spectral response of the proposed resonant filter is numerically simulated using typical values for monolithic input beam size (3 /spl mu/m/spl times/1.5 /spl mu/m) and first-order mirror reflectivities.\",\"PeriodicalId\":369241,\"journal\":{\"name\":\"International Semiconductor Device Research Symposium, 2003\",\"volume\":\"40 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-12-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Semiconductor Device Research Symposium, 2003\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISDRS.2003.1272097\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Semiconductor Device Research Symposium, 2003","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISDRS.2003.1272097","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MEMS-tunable novel monolithic optical filters in InP with horizontal Bragg mirrors
Theoretical analysis of an optical waveguide based horizontal resonant microcavity filter in InP, which is tunable within a broad wavelength range of 350 nm by MEMS electrostatic actuation is presented in this paper. The microcavity is formed between the input and output waveguides by fabricating monolithically integrated horizontal distributed Bragg reflector (DBR) mirrors. The length of the microcavity is varied by a total of 200 nm in steps of 10 nm to meet the Fabry-Perot resonant condition. Spectral response of the proposed resonant filter is numerically simulated using typical values for monolithic input beam size (3 /spl mu/m/spl times/1.5 /spl mu/m) and first-order mirror reflectivities.
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