L. Gitelman, Z. Gutman, S. Bar-Lev, S. Stolyarova, Y. Nemirovsky
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CMOS-SOI-MEMS transistor (TMOS) for infrared imaging
The novel concept of thermally isolated CMOS-SOI-MEMS transistor serving as IR detector (TMOS) is presented and characterized, showing high potential for thermal imaging, allowing long integration time because of negligible self heating.
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