基于原位表征的三维约束条件下充填体固化残余应力各向异性研究

Tao Peng, Xiaohui Peng, Wenjie Wu, L. Peng, Gang Li, Jinbao Yang, Yuanyuan Yang, Jing Chen, Caiping Zhu, Pengli Zhu, Rong Sun
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引用次数: 0

摘要

为了提高微电子封装的可靠性,在倒装封装中广泛采用下填充来保护焊点免受危险环境的影响。然而,下填土固化收缩产生的残余应力一直是影响可靠性的一个重要问题。目前,对封装结构约束状态下的固化残余应力缺乏全面的认识。本文在倒装芯片试验车(FCTV)上进行了一种新颖的原位表征,以分析三维约束状态下的充填体固化行为。有趣的是,在三维约束状态下,固化收缩率表现出各向异性,z轴方向的实际收缩率远大于X/ y轴方向的实际收缩率。z轴方向的收缩会在焊料凸起处产生残余压应力(或预应力),而X/ y轴方向的收缩主要是残余收缩,对翘曲有明显的贡献。因此,除了CTE失配外,固化残余应力在热过程中对封装翘曲和变形也起着重要作用。此外,层状下填体脱离约束状态后出现的异常负膨胀行为(NEB)似乎也与固化残余应力有关,有待进一步研究。本研究为下填料固化残余应力对封装结构可靠性的影响提供了新的视角。
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Anisotropy of curing residual stress of underfill in the encapsulation under three-dimensionally constrained condition based on in-situ characterization
To improve the reliability of microelectronic packages, underfills are widely used in flip-chip packages to protect solder bumps from hazard environment. Nevertheless, the residual stress caused by the curing shrinkage of underfill has always an important issue for the reliability. Currently, there is a lack of comprehensive understanding of the curing residual stress in the constrained state of packaging structure. In this work, a novel in-situ characterization was conducted on the flip-chip test vehicle (FCTV) to analyze the curing behavior of underfill in the 3-dimensionally constrained state. Interestingly, the curing shrinkage exhibited anisotropy under 3-dimensionally constrained state, and the actual shrinkage in Z-axis direction was much larger than that in X/Y-axis direction. The shrinkage in Z-axis direction can produce residual compressive stress (or prestress) in the solder bumps, while the shrinkage in X/Y-axis direction was mainly residual shrinkage, which contributed obviously to warpage. Therefore, except for CTE mismatch, curing residual stress also played an important role in the package warpage and deformation during thermal processes. In addition, an abnormal negative expansion behavior (NEB) in the laminar underfill after release from the constrained state also seemed to be related to the curing residual stress and needs to be further studied. This work provided a new perspective on the influence of underfill curing residual stress on the reliability of packaging structures.
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