采用金球螺柱作为微铆钉的薄asic上金属箔与铝衬垫之间的机械强度评估与优化

V. Giagka, A. Vanhoestenberghe, N. Donaldson, A. Demosthenous
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引用次数: 2

摘要

我们正在研发一种用于硬膜外脊髓刺激的主动植入物。在其内部嵌入薄应用专用集成电路(ASIC) (~80 μm)。激光图型轨道使用金球螺柱在ASIC衬垫上电和机械热声结合,形成微铆钉穿过轨道箔的孔,这种互连方法称为电铆钉结合,或微弯曲[1]。在这项工作中,我们试图表征和优化技术,就其结合强度而言。这项技术相对较新,到目前为止,化学键的机械强度只研究了金轨道上的互连。然而,标准asic通常带有铝衬垫。我们对金属轨道和铝制ASIC衬垫之间的连接进行了一系列拉力测试。在这些测试中,我们关注的是不同参数对结合强度的影响,更具体地说,是金球的大小和箔上孔的大小。我们记录了不同参数组合下粘结破坏前的最大力(应力)。我们的结果表明,根据工艺参数的不同,平均应力值在9.6到60 cN之间变化。已经确定了不同的失效机制,并对其进行了讨论。总的来说,我们得出的结论是,更大的孔提供了更大的接触面积,通常会导致更强的键合,但球和孔尺寸的正确组合,即使是更小的孔,也可能导致更强的键合。
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Evaluation and optimization of the mechanical strength of bonds between metal foil and aluminium pads on thin ASICs using gold ball studs as micro-rivets
We are developing an active implant for epidural spinal cord stimulation. A thin application specific integrated circuit (ASIC) (~80 μm) is to be embedded within it. The laser patterned tracks are electrically and mechanically thermosonically bonded on the ASIC pads using gold ball studs, forming micro-rivets through holes in the foil of the tracks, an interconnection method called electrical rivet bonding, or microflex [1]. In this work, we sought to characterize and optimize the technique, with respect to its bonding strength. The technique is relatively new and, so far, the mechanical strength of the bonds has only been investigated for interconnection on gold tracks. Standard ASICs however, normally come with aluminium pads. We ran a series of pull tests on the bonds between the metal tracks and aluminium ASIC pads. In these tests, we were concerned with the effect of the different parameters on the bond strength, and more specifically the size of the gold balls and the size of the holes in the foil. We recorded the maximum force (stress) before bond failure for different combinations of parameters. Our results indicate that average stress values can vary between 9.6 and 60 cN, depending on the process parameters. Different failure mechanisms have been identified and these are discussed. Overall, we conclude that larger holes provide larger contact areas with the substrate and generally result in stronger bonds, but the right combination of ball and hole sizes, could lead to strong bonds even with smaller holes.
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