在130nm SiGe BiCMOS技术中优化nMOS SPDT系列并联开关的设计和布局技术

J. Comeau, J. Cressler, M. Mitchell
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引用次数: 9

摘要

本研究研究了基于mosfet的串联分流、单极双掷(SPDT)开关在商用130纳米硅锗(SiGe) BiCMOS技术中的各种设计和布局优化方法。研究了系列nMOS器件的深沟槽隔离、附加衬底触点和附加栅极电阻的结合,并对这些设计和布局优化对开关插入损耗、带宽、隔离和线性性能的影响进行了跨频率量化。该实验产生了一个SPDT开关,在5.8 GHz、10 GHz和20 GHz时,其插入损耗分别为- 1.4 dB、-1.5 dB和-2.0 dB,在9.5 GHz时,其输入参考三阶截距点(II P3)为21 dBiu,而无需使用任何过程加器或额外的电源电压。
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Design and Layout Techniques for the Optimization of nMOS SPDT Series-Shunt Switches in a 130nm SiGe BiCMOS Technology
This work investigates various design and layout optimization approaches for MOSFET-based series-shunt, single-pole double-throw (SPDT) switches in a commercially-available 130 nm silicon-germanium (SiGe) BiCMOS technology. The incorporation of deep-trench isolation, additional substrate contacts, and additional gate resistance for the series nMOS device are examined, and the impact of these design and layout optimizations on the switches insertion loss, bandwidth, isolation and linearity performance have been quantified across frequency. This experiment has yielded a SPDT switch with an insertion loss of - 1.4 dB, -1.5 dB, and -2.0 dB, at 5.8 GHz, 10 GHz, and 20 GHz, respectively, and an input-referred third-order intercept point (II P3) of 21 dBiu at 9.5 GHz, without the use of any process adders or additional supply voltages.
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