用SOI晶圆制造可变形反射镜光学扫描仪

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607846

T. Sasaki, K. Hane

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引用次数: 0

摘要

利用SOI晶圆制备了一种具有可变形反射镜的光学扫描仪。采用1微米厚的SOI晶圆顶部硅层制作可变形镜。活动梳和固定梳由硅衬底制成。镜面由梳状致动器旋转，并受静电力独立变形。镜面旋转角度为12度，电压为80伏。在100 V下，反射镜中心的变形为3 nm。

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Optical scanner with deformable mirror fabricated from SOI wafer

An optical scanner with a deformable mirror is fabricated using SOI wafer. A 1 mum thick top silicon layer of SOI wafer is used to fabricate a deformable mirror. Movable comb and fixed comb are fabricated from the silicon substrate. The mirror is rotated by the comb actuator and it is also deformed by an electrostatic force independently. The rotation angle of the mirror is 12 degrees at 80 V. The deformation at the mirror center is 3 nm at 100 V.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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