微电子工业用胶粘剂的DMA表征和界面断裂韧性表征的松弛实验。困难和解决办法

I. Maus, H. Preu, M. Niessner, H. Nabi, K. Jansen, R. Pantou, L. Weiss, B. Michel, B. Wunderle
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摘要

导电胶粘剂广泛应用于半导体技术。本工作的重点是采用大量导电填料颗粒的各向同性导电胶粘剂(ICA)。通过动态力学分析(DMA)和弛豫实验,研究了高填充环氧基模贴材料的材料特性,从而推导出宽温度范围内的弹性和粘弹性材料模型。环氧基高填充模附材料的测量是一个具有挑战性的课题。我们展示了如何克服测量这些材料的困难。关键界面断裂数据,包括临界(应变)能量释放率Gc(Ψ)作为温度、湿度或老化的函数,是微电子工业中与可靠性相关的失效建模、寿命预测和设计评估的关键数据[1],但在文献中很少给出。因此需要快速的测量方法[2,3]。本文提出了一种用微混合模测试仪(μMMT)[2]对实物试样进行临界断裂力学性能测试的方法,并利用线弹性断裂力学和内聚区建模对试样进行数值评价。
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Characterization of adhesives for microelectronic industry in DMA and relaxation experiments for interfacial fracture toughness characterization — Difficulties and solution
Electrically conductive adhesives are widely used in semiconductor technology. The focus of this work is set on Isotropic Conductive Adhesives (ICA) with a high amount of electrically conductive filler particles. The aim of this work is the material characterization of highly filled epoxy based die attaches materials by dynamic mechanical analysis (DMA) and relaxation experiments in order to derive elastic and viscoelastic material models in a wide temperature range. The measurement of the epoxy based highly filled die attach material is a challenging topic. We show how to overcome the difficulties in measuring these materials. Critical interface fracture data, which include the Critical (Strain) Energy Release Rate Gc(Ψ) as a function of temperature, humidity or aging, are crucially needed in microelectronic industry for failure modeling, lifetime prediction and design evaluation associated with reliability [1], but they are rarely given in literature. Therefore fast measurement methods are needed [2, 3]. This work shows a measurement method of the critical fracture mechanic properties with the micro Mixed Mode Tester (μMMT) [2] on samples cut from real products and their numerical evaluation using linear elastic fracture mechanics and cohesive zone modeling.
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