在cmos兼容的300毫米硅光子晶圆上生长的量子点激光器

Kaiyin Feng, C. Shang, E. Hughes, R. Koscica, A. Clark, G. Leake, D. Harame, J. Bowers
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引用次数: 0

摘要

我们展示了第一个电注入量子点激光器,直接生长在300毫米的嵌入式和图像化硅光子晶片上,在20°C下连续波激光的最大输出功率高于69 mW。这一结果显示了III-V增益元件在cmos兼容硅光子电路上直接异质外延集成的潜力。
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Quantum-Dot Lasers Grown on CMOS-compatible 300 mm Si Photonic Wafers
We demonstrate the first electrically injected quantum dot lasers directly grown on recessed and patterned 300 mm Si photonic wafers, with CW lasing maximum output power higher than 69 mW at 20 °C. This result shows potential for direct heteroepitaxial integration of III–V gain elements onto CMOS-compatible silicon photonic circuits.
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