利用谐振式大孔径MEMS反射镜阵列和激光测距技术进行三维成像

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607837

T. Sandner, M. Wildenhain, T. Klose, H. Schenk, S. Schwarzer, V. Hinkov, H. Hofler, H. Wolfelschneider

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引用次数: 19

摘要

本文提出了一种基于MEMS反射镜阵列的扫描激光雷达系统概念。阵列解决方案允许大的接收孔径，同时保持出色的可靠性，高扫描速度，紧凑的尺寸和小的系统重量。我们展示了使用单镜原型的第一个结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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3D imaging using resonant large-aperture MEMS mirror arrays and laser distance measurement

We present a system concept for a scanning laser radar employing a newly developed MEMS mirror array. The array solution permits large reception apertures while preserving outstanding reliability, high scanning speed, compact size and small system weight. We show first results using a single-mirror prototype.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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