使用应变和晶格匹配InAlAs/InGaAs异质结构的p型掺杂沟道场效应管

Y. Chan, D. Pavlidis
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引用次数: 3

摘要

制备了晶格匹配(x=0.53)和应变(x=0.65) In/sub 0.52/Al/sub 0.48/As/In/sub x/Ga/sub 1-x/As p掺杂的双通道场效应管,并进行了实验研究。该材料系统提供高速运行所需的高载流子速度和大带隙不连续。本文报道了场效应管的设计及其直流和高频特性。该应变设计使用1.0 μ m长的栅极,将固有跨导率从23 mS/mm提高到46.5 mS/mm。截止频率也从1.0 GHz提高到1.5 GHz。
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p-type doped channel FETs using strained and lattice matched InAlAs/InGaAs heterostructures
Lattice matched (x=0.53) and strained (x=0.65) In/sub 0.52/Al/sub 0.48/As/In/sub x/Ga/sub 1-x/As p-doped dual-channel FETs were fabricated and investigated experimentally. This material system offers a high carrier velocity and large bandgap discontinuity as required for high-speed operation. The design and the DC and high-frequency characteristics of the FETs are reported. The strained design enhances the intrinsic transconductance from 23 mS/mm to 46.5 mS/mm using 1.0- mu m-long gates. The cutoff frequency also improves from 1.0 GHz to 1.5 GHz.<>
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Expertise, optimisation and control of InP and related technologies by scanning photoluminescence measurements Dislocation density after S-diffusion into p-type InP substrates Surface recombination and high efficiency in InP solar cells Molecular beam epitaxial growth techniques for graded-composition InGaAlAs/InP alloys Submicron double heterojunction strained InAlAs/InGaAs HEMTs: an experimental study of DC and microwave properties
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