T. Lammerink, N. Tas, J. Berenschot, M. Elwenspoek, J. Fluitman
{"title":"微机械液压稳定多谐振荡器","authors":"T. Lammerink, N. Tas, J. Berenschot, M. Elwenspoek, J. Fluitman","doi":"10.1109/MEMSYS.1995.472561","DOIUrl":null,"url":null,"abstract":"The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"243 2","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"18","resultStr":"{\"title\":\"Micromachined hydraulic astable multivibrator\",\"authors\":\"T. Lammerink, N. Tas, J. Berenschot, M. Elwenspoek, J. Fluitman\",\"doi\":\"10.1109/MEMSYS.1995.472561\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.\",\"PeriodicalId\":273283,\"journal\":{\"name\":\"Proceedings IEEE Micro Electro Mechanical Systems. 1995\",\"volume\":\"243 2\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-01-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"18\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings IEEE Micro Electro Mechanical Systems. 1995\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.1995.472561\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1995.472561","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.
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