{"title":"基于SOI衬底的温度无关阵列波导光栅解复用器的设计与制造","authors":"M. Uenuma, Y. Ikoma, Y. Kato, T. Motooka","doi":"10.1109/SOI.2005.1563557","DOIUrl":null,"url":null,"abstract":"In this paper, we propose temperature independent AWG using silicon-on-insulator (SOI). Since the length of each waveguide is equal and the second star coupler consists of the hollow slab, the temperature dependence can be eliminated. Wavelength-multiplexed light is divided by the first diffraction order in the output slab region. We fabricated the AWG composed of equal-length waveguides on SOI substrates and the demultiplexing characteristic was measured.","PeriodicalId":116606,"journal":{"name":"2005 IEEE International SOI Conference Proceedings","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-12-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Design and fabrication of temperature-independent arrayed-waveguide grating demultiplexers on SOI substrates\",\"authors\":\"M. Uenuma, Y. Ikoma, Y. Kato, T. Motooka\",\"doi\":\"10.1109/SOI.2005.1563557\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we propose temperature independent AWG using silicon-on-insulator (SOI). Since the length of each waveguide is equal and the second star coupler consists of the hollow slab, the temperature dependence can be eliminated. Wavelength-multiplexed light is divided by the first diffraction order in the output slab region. We fabricated the AWG composed of equal-length waveguides on SOI substrates and the demultiplexing characteristic was measured.\",\"PeriodicalId\":116606,\"journal\":{\"name\":\"2005 IEEE International SOI Conference Proceedings\",\"volume\":\"14 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-12-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2005 IEEE International SOI Conference Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SOI.2005.1563557\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 IEEE International SOI Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOI.2005.1563557","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design and fabrication of temperature-independent arrayed-waveguide grating demultiplexers on SOI substrates
In this paper, we propose temperature independent AWG using silicon-on-insulator (SOI). Since the length of each waveguide is equal and the second star coupler consists of the hollow slab, the temperature dependence can be eliminated. Wavelength-multiplexed light is divided by the first diffraction order in the output slab region. We fabricated the AWG composed of equal-length waveguides on SOI substrates and the demultiplexing characteristic was measured.
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