U. Srinivasan, M. Helmbrecht, C. Rembe, R. Muller, R. Howe
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Fluidic self-assembly of micromirrors onto surface micromachined actuators
We describe the fluidic self-assembly of ultra-flat, single-crystal silicon micromirrors onto a surface micromachined actuator array. Sub-micron precision self-alignment of the mirrors onto the actuator platforms is achieved by pattern matching hydrophobic binding sites on the underside of the mirror and on the platform.
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