MCM设备上的铜线粘合(凹凸球上的粘合缝)

Tan Boo Wei, Niu You Hua
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引用次数: 1

摘要

铜线键合在多芯片(MCM)器件上越来越流行,这与将更多功能集成到单个产品中的总体工业趋势是一致的。为了支持设备到设备的互连;粘接球上缝(BSOB)粘接方法在工业中应用非常广泛。然而,铜线由于其材料硬度,与金线相比,更难制造成BSOB。本文讨论了铜线键合BSOB面临的主要挑战及其解决方案。问题解决方法包括铜材料的选择、键合工具(毛细管)的设计、键合概念和特殊的线键合软件功能,以开发具有良好可靠性和生产价值的坚固的铜线键合工艺窗口。
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Copper wire bond on MCM device (bond stitch on bump ball)
Copper wire bonding is becoming popular on multi chip (MCM) device in parallel with the general industry trend of integrating more functions into single product. In order to support device to device interconnect; bond stitch on ball (BSOB) bonding method is quite generally used in the industry. However, copper wire due to its material hardness is more difficult to be manufactured into BSOB as compared to gold wire. In this paper, key challenges for copper wire bond BSOB and its solutions are discussed. Problem solving methodology including copper material selection, bonding tool (capillary) design, bonding concept and special wire bond software features will be explored to develop robust process window for copper wire bonding with good reliability and production worthy.
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