{"title":"IGZO沉积过程中Ar/O2比值对HfLaO栅极介质a-IGZO TFT电学特性的影响","authors":"L. Qian, P. Lai","doi":"10.1109/EDSSC.2013.6628089","DOIUrl":null,"url":null,"abstract":"In this work, the influence of Ar/O2 ratio during InGaZnO (IGZO) deposition on the electrical characteristics of a-IGZO thin-film transistor (TFT) with HfLaO gate dielectric has been investigated. It is found that lowering the oxygen concentration in the a-IGZO sputtering ambient can effectively improve the device performance, including carrier mobility (μsat), threshold voltage (Vth), sub-threshold slope (SS) and on-off current ratio (Ion/Ioff). Moreover, the hysteresis (ΔVH) of the transfer characteristics of the device under forward and reverse sweepings of gate bias voltage can be suppressed, and improvement on its low-frequency noise properties has been found for lower oxygen concentration in the sputtering ambient. As a result, a high saturation mobility of 12.5 cm2/Vs, a low sub-threshold slope of 0.260 V/dec and a small Hooge's parameter (αH) of 0.4 have been achieved for the sample with an Ar/O2 ratio of 24 sccm/1 sccm. All these improvements can be ascribed to the fact that more oxygen vacancies exist in the a-IGZO film deposited in an ambient with less oxygen. These positively-charged oxygen vacancies can induce a higher electron concentration in the a-IGZO film and thus fill up more electron traps at the interface between a-IGZO and HtLaO.","PeriodicalId":333267,"journal":{"name":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2013-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Influence of Ar/O2 ratio during IGZO deposition on the electrical characteristics of a-IGZO TFT with HfLaO gate dielectric\",\"authors\":\"L. Qian, P. Lai\",\"doi\":\"10.1109/EDSSC.2013.6628089\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, the influence of Ar/O2 ratio during InGaZnO (IGZO) deposition on the electrical characteristics of a-IGZO thin-film transistor (TFT) with HfLaO gate dielectric has been investigated. It is found that lowering the oxygen concentration in the a-IGZO sputtering ambient can effectively improve the device performance, including carrier mobility (μsat), threshold voltage (Vth), sub-threshold slope (SS) and on-off current ratio (Ion/Ioff). Moreover, the hysteresis (ΔVH) of the transfer characteristics of the device under forward and reverse sweepings of gate bias voltage can be suppressed, and improvement on its low-frequency noise properties has been found for lower oxygen concentration in the sputtering ambient. As a result, a high saturation mobility of 12.5 cm2/Vs, a low sub-threshold slope of 0.260 V/dec and a small Hooge's parameter (αH) of 0.4 have been achieved for the sample with an Ar/O2 ratio of 24 sccm/1 sccm. All these improvements can be ascribed to the fact that more oxygen vacancies exist in the a-IGZO film deposited in an ambient with less oxygen. These positively-charged oxygen vacancies can induce a higher electron concentration in the a-IGZO film and thus fill up more electron traps at the interface between a-IGZO and HtLaO.\",\"PeriodicalId\":333267,\"journal\":{\"name\":\"2013 IEEE International Conference of Electron Devices and Solid-state Circuits\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-06-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 IEEE International Conference of Electron Devices and Solid-state Circuits\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EDSSC.2013.6628089\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE International Conference of Electron Devices and Solid-state Circuits","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDSSC.2013.6628089","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Influence of Ar/O2 ratio during IGZO deposition on the electrical characteristics of a-IGZO TFT with HfLaO gate dielectric
In this work, the influence of Ar/O2 ratio during InGaZnO (IGZO) deposition on the electrical characteristics of a-IGZO thin-film transistor (TFT) with HfLaO gate dielectric has been investigated. It is found that lowering the oxygen concentration in the a-IGZO sputtering ambient can effectively improve the device performance, including carrier mobility (μsat), threshold voltage (Vth), sub-threshold slope (SS) and on-off current ratio (Ion/Ioff). Moreover, the hysteresis (ΔVH) of the transfer characteristics of the device under forward and reverse sweepings of gate bias voltage can be suppressed, and improvement on its low-frequency noise properties has been found for lower oxygen concentration in the sputtering ambient. As a result, a high saturation mobility of 12.5 cm2/Vs, a low sub-threshold slope of 0.260 V/dec and a small Hooge's parameter (αH) of 0.4 have been achieved for the sample with an Ar/O2 ratio of 24 sccm/1 sccm. All these improvements can be ascribed to the fact that more oxygen vacancies exist in the a-IGZO film deposited in an ambient with less oxygen. These positively-charged oxygen vacancies can induce a higher electron concentration in the a-IGZO film and thus fill up more electron traps at the interface between a-IGZO and HtLaO.