R. Lockhart, M. Tormen, P. Niedermann, T. Overstolz, A. Hoogerwerf, R. Stanley
{"title":"用于外腔激光器和微光谱仪的高效率MEMS可调谐光栅","authors":"R. Lockhart, M. Tormen, P. Niedermann, T. Overstolz, A. Hoogerwerf, R. Stanley","doi":"10.1109/OMEMS.2008.4607814","DOIUrl":null,"url":null,"abstract":"Optical characterization of a second generation MEMS tuneable blazed grating with a 1times1 mm active area has demonstrated high-efficiency wavelength filtering with reflected outputs >90% and tuning over 25 nm in the near-infrared (NIR).","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"76 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":"{\"title\":\"High-efficiency MEMS tuneable gratings for external cavity lasers and microspectrometers\",\"authors\":\"R. Lockhart, M. Tormen, P. Niedermann, T. Overstolz, A. Hoogerwerf, R. Stanley\",\"doi\":\"10.1109/OMEMS.2008.4607814\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Optical characterization of a second generation MEMS tuneable blazed grating with a 1times1 mm active area has demonstrated high-efficiency wavelength filtering with reflected outputs >90% and tuning over 25 nm in the near-infrared (NIR).\",\"PeriodicalId\":402931,\"journal\":{\"name\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"volume\":\"76 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"10\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2008.4607814\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607814","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
High-efficiency MEMS tuneable gratings for external cavity lasers and microspectrometers
Optical characterization of a second generation MEMS tuneable blazed grating with a 1times1 mm active area has demonstrated high-efficiency wavelength filtering with reflected outputs >90% and tuning over 25 nm in the near-infrared (NIR).