流动物料通道前沟槽侧壁热电偶

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI:10.1109/MEMSYS.2015.7051090

M. Shibata, Takahiro Yamaguchi, S. Kumagai, M. Sasaki

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引用次数: 2

摘要

在微流控通道中，采用三维光刻技术在微流控通道的侧壁上制备热电偶。侧壁上的热电偶可以直接感知通道内的微流体，实现精确的温度测量。此外，侧壁上的热电偶金属不会产生阴影，允许使用光学显微镜进行观察。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Thermocouples on trench sidewall in channel fronting on flowing material

In a microfluidic channel, thermocouples were fabricated on the sidewall of microchannel using the three-dimensional photolithography. The thermocouples on the side wall can directly sense the microfluid in the channel, and the accurate temperature measurement can be achieved. Moreover, the thermocouple metals on the sidewall do not make the shadow allowing the observation using the optical microscopy.

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2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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