面向5G毫米波应用的基于芯片末级FOWLP的封装天线(FO-AiP)

Klaus Ahn, Jade Park, Bruce Lee, L. Kang, Jay Kim, Kyeongrok Shin, Sung Hyuk Kim, Jea-Duck Lee, Myoung Kee Kim, Ho-Seon Lee, Byeongyong Park, Bok-Ju Park, Tong-Ook Kong
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摘要

5G无线通信,有两个频段:sub-6 (3.5GHz)和毫米波(26GHz、28GHz和39GHz)。虽然sub-6频率主要用于5G无线通信,但随着数据量的增加,消费者对毫米波的需求也在不断增长。然而,在毫米波频率范围内工作的系统必须处理比在sub-6频率范围内高得多的信号损耗。此外,互连的物理尺寸(芯片到芯片,芯片到天线)变得与工作波长相当。因此,需要与毫米波频率范围相对应的新型封装技术。为毫米波5G应用开发了采用FOWLP技术的射频芯片集成天线。对FO-AiP的天线和封装结构进行了设计和仿真,以获得最佳性能。此外,还开发了封装工艺技术来实现所设计的FO-AiP结构。FO-AiP采用阵列贴片天线,目标频率为28GHz,封装技术类似于双模FOWLP。采用透明的低Dk/ Df绝缘材料代替第二模复合材料。FO-AiP已在RDL第一个300mm晶圆尺寸的FOWLP中启动。仿真得到S11≤-10 dB条件下的单贴片天线带宽为26.5 ~ 29.5 GHz,工作频段天线增益为7.5 dBi。对于2 × 2阵列天线,在保持3GHz天线带宽的情况下,天线增益增加超过10dbi。测量结果与仿真结果吻合较好。因此,FO-AiP应该是5G毫米波系统应用的一个有前途的技术。
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Chip-last FOWLP based antenna-in-package (FO-AiP) for 5G mmWave application
5G wireless communication, there is two frequency bands: sub-6 (3.5GHz) and mmWave (26GHz, 28GHz and 39GHz). Although sub-6 frequency is mainly used in 5G wireless communication, the demand on mmWave of consumer is growing according to increasing the amount of data. However, systems operating at mmWave frequency range have to manage with much higher signal losses then in the sub-6 frequency range. Moreover, the physical size of interconnections (chip to chip, chip to antenna) becomes comparable to the operating wavelength. Therefore, new packaging technology is required corresponding the mmWave frequency range. Antenna integrated with RF chip using FOWLP technology has been developed for mmWave 5G application. The antenna and package structure of FO-AiP have been designed and simulated to obtain optimized performance. Besides, packaging process technologies have been developed to realize the designed FO-AiP structure. The FO-AiP is fabricated with array patch antenna for target frequency of 28GHz and package technology is similar to double molded FOWLP. Instead of 2nd mold compound, transparent low Dk/ Df insulation material has been adopted. The FO-AiP has been started in RDL first FOWLP on 300mm wafer size. The simulated single-patch antenna bandwidth under S11 ⩽ -10 dB was from 26.5 to 29.5 GHz and antenna gain of 7.5 dBi in the operating band. For 2 x 2 array antenna, antenna gain increased over 10 dBi while maintaining the 3GHz antenna bandwidth. The measurement results have a good agreement with the simulation. As a result, FO-AiP should be a promising technology for 5G mmWave system application.
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