利用MBE在多孔GaN片上生长器件级的InGaN,其面内晶格常数相当于完全松弛的In0.12Ga0.88N

C. Wurm, H. Collins, N. Hatui, Weiyi Li, S. Pasayat, R. Hamwey, K. Sun, I. Sayed, K. Khan, E. Ahmadi, S. Keller, U. Mishra
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引用次数: 0

摘要

器件质量,松弛的InGaN衬底一直是一个非常感兴趣的话题,特别是对于长波长的光电子学。这项工作表明,在0.2 ga0.8 n中生长的mbe具有60%的应变松弛,对应于在GaN-on-多孔GaN伪衬底(PS)上生长的等效完全松弛的12%的In-composition。发现该膜的表面形貌没有v型缺陷,并且具有与其下GaN层相当的螺纹位错密度。
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Demonstration of device-quality InGaN grown on porous GaN tiles by MBE with an in-plane lattice constant equivalent to fully relaxed In0.12Ga0.88N
Device-quality, relaxed InGaN substrates has been a topic of great interest, particularly for longer wavelength optoelectronics. This work demonstrates MBE-grown In0.2Ga0.8N with a strain relaxation of 60% corresponding to an equivalently fully relaxed In-composition of 12% achieved by growing on a GaN-on-porous GaN pseudo-substrate (PS). The surface morphology of this film was found to be free of V-defects on the surface and with a threading dislocation density comparable to that of the GaN layers beneath.
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