大型晶圆级封装的可靠性研究:优化封装结构和材料以提高板级可靠性

Markus Jarn, Chueh-An Hsieh, Yu-Chi Pai, Tsaiying Wang, J. Hunt
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引用次数: 4

摘要

近年来,电子元件的晶圆级封装(WLP)越来越受欢迎。WLP封装具有与模具相同的足迹,因此是最小的封装。这对于需要在小空间内实现最大功能的应用程序非常重要,特别是对于移动设备。近年来,用于WLP组件的最大封装尺寸和引脚数稳步增加。由于WLP封装中的机械应力随着芯片尺寸的增加而增加,板级可靠性成为一个主要问题。因此,问题出现了:WLP最大的芯片尺寸可能满足板级可靠性要求,对于给定的封装尺寸,如何提高板级可靠性?为了开始回答这些问题,我们设计了一个基于虚拟晶圆(8×8 mm尺寸,444个连接,0.4mm间距)的大型模具测试车,其封装特征在当今生产的设备中很常见,例如再分布迹线,聚合物钝化层,碰撞金属化,以及用于连接到测试板的焊接球。我们采用晶圆级工艺,在不同条件下组装了测试车,进行了实验设计。我们改变了聚合物钝化厚度、再分布厚度和最终模具厚度的参数,然后表征了温度循环和跌落测试条件下的板级可靠性。
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Reliability investigations of large die wafer level packages: Optimization of package structure and materials to improve board level reliability
Wafer level packaging (WLP) of electronic components has become increasingly popular in recent years. The WLP package has the same foot print as the die and is therefore the smallest package possible. This is important for applications where maximum functionality is required in a small space, especially for mobile devices. The largest package sizes and pin counts used for WLP components have steadily increased in recent years. As the mechanical stresses in WLP packages increase with die size as well, board level reliability becomes a major concern. As such, the questions arise: what is the maximum die size possible for a WLP to meet board level reliability requirements and, for a given package size, how can the board level reliability be improved? To start to answer these questions, we have designed a large die test vehicle based on a dummy wafer (8×8 mm in size with 444 connections at 0.4mm pitch) with features in the package that are common to devices in production today, such as redistribution traces, polymer passivation layers, under bump metallization, and solder balls for interconnection to the test board. Using wafer level processes, we have assembled the test vehicles under different conditions in a design of experiment. We varied the parameters of polymer passivation thickness, redistribution trace thickness, and final die thickness and then characterized the board level reliability under temperature cycling and drop test conditions for a statistically significant sample size.
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