{"title":"基于单晶PMN-PT的MEMS自适应光学变形镜","authors":"Hyunkyu Park, D. Horsley","doi":"10.1109/OMEMS.2008.4607843","DOIUrl":null,"url":null,"abstract":"A MEMS-based deformable mirror constructed using single-crystal PMN-PT for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. A large stroke and high operating bandwidth assure that the DM can be a promising wavefront corrector.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"MEMS deformable mirrors for adaptive optics using single crystal PMN-PT\",\"authors\":\"Hyunkyu Park, D. Horsley\",\"doi\":\"10.1109/OMEMS.2008.4607843\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A MEMS-based deformable mirror constructed using single-crystal PMN-PT for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. A large stroke and high operating bandwidth assure that the DM can be a promising wavefront corrector.\",\"PeriodicalId\":402931,\"journal\":{\"name\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2008.4607843\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607843","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MEMS deformable mirrors for adaptive optics using single crystal PMN-PT
A MEMS-based deformable mirror constructed using single-crystal PMN-PT for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. A large stroke and high operating bandwidth assure that the DM can be a promising wavefront corrector.
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