基于脉冲电应力的InGaP HBT可靠性缺陷检测与建模

C. Sydlo, B. Mottet, H. Ganis, H. Hartnagel, V. Krozer, S. Delage, S. Cassette, E. Chartier, D. Floriot, S. Bland
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引用次数: 0

摘要

近十年来,GaAs HBT(异质结双极晶体管)技术已经达到一定程度的成熟,但可靠性问题尚未完全解决。因此,采用了基于InGaP/GaAs的材料系统,在优化基极-发射极界面和金属触点后,提高了器件的可靠性。对安全相关应用和大众市场日益增长的需求不仅需要高可靠性的设备及其寿命数据,还需要对退化机制和短时间可靠性评估有更多的物理理解。本文提出了两种激发与InGaP HBTs相关的“氢效应”的方法。
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Defect detection and modelling using pulsed electrical stress for reliability investigations on InGaP HBT
GaAs HBT (heterojunction bipolar transistor) technology has reached a certain degree of maturity in the last decade, although reliability problems are not completely solved. In consequence, a material system based on InGaP/GaAs is used, resulting in improved device reliability after the base-emitter interface and the metal contacts have been optimised. The increasing demand for security relevant applications and for the mass market requires not only highly reliable devices and their lifetime data, but also an increased physical understanding of degradation mechanisms and short times for reliability evaluation. In this paper, two approaches are presented for the excitement of the "hydrogen-effect", which has been reported in connection with InGaP HBTs.
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