烧结温度对无压烧结铜膏模剪强度的影响

D. Ishikawa, T. Blank, H. Wurst, Felix Steiner, H. Nakako
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引用次数: 1

摘要

利用铜烧结浆料的模键合技术是一种有吸引力的、重要的高温工作功率器件的连接方法。本文描述了烧结温度对非压力烧结铜(sCu)在六种不同金属镀层(Cu、Ni、化学镍、Pd、Ag和Au)上的模剪强度的影响。在H2气体烧结温度(225 ~ 350℃)下,测定了金属镀层上sCu的模剪强度。随着烧结温度的升高,Cu、Ni和ENi镀层的抗剪强度增大,而Pd、Ag和Au镀层的抗剪强度减小。通过SEM/EDX分析界面元素分布,发现自扩散偶和非扩散偶(sCu:Cu、sCu:Ni、sCu:ENi)能保持较高的剪切强度,扩散偶(sCu:Pd、sCu:Ag、sCu:Au)会降低剪切强度。
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Effect of Sintering Temperature for Die-shear Strength of Non-pressure Sintering Copper Paste on Metal Plating
Die-bonding technology using Cu sinter pastes is an attractive and important joint method for power devices operating at higher temperatures. This paper describes the effect of sintering temperatures on die-shear strengths of non-pressure sintered copper (sCu) onto six different metal platings (Cu, Ni, Electroless Ni, Pd, Ag, and Au). The die-shear strengths of sCu on the metal plating under sintering temperatures (225-350 °C) in H2 gas were measured. As the sintering temperatures increased, the shear strengths on the Cu, Ni, and ENi plating increased, whereas those on the Pd, Ag, and Au plating decreased. By analyzing the element distribution on the bonding interfaces using SEM/EDX, it was found that the self- and non-diffusion couples (sCu:Cu, sCu:Ni, sCu:ENi) can keep the high shear strengths and the diffused couples (sCu:Pd, sCu:Ag, sCu:Au) can deteriorate the shear strengths.
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