Y. Ohira, A. Checkovskiy, T. Yamanoi, T. Endo, H. Fujita, H. Toshiyoshi
{"title":"用于显示应用的高功率处理MEMS光学扫描仪","authors":"Y. Ohira, A. Checkovskiy, T. Yamanoi, T. Endo, H. Fujita, H. Toshiyoshi","doi":"10.1109/OMEMS.2008.4607833","DOIUrl":null,"url":null,"abstract":"This paper reports a design and fabrication technique of high-power handling MEMS (micro electro mechanical systems) optical scanner for laser 3D image display application. The MEMS scanner is designed to control the reflection of high-power YAG-laser beam of 5 W (0.5 mW/pulse) by the optomechanical combination of a dielectric-film coated mirror cube and an electrostatic MEMS scanner platform.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"A high-power handling MEMS optical scanner for display applications\",\"authors\":\"Y. Ohira, A. Checkovskiy, T. Yamanoi, T. Endo, H. Fujita, H. Toshiyoshi\",\"doi\":\"10.1109/OMEMS.2008.4607833\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports a design and fabrication technique of high-power handling MEMS (micro electro mechanical systems) optical scanner for laser 3D image display application. The MEMS scanner is designed to control the reflection of high-power YAG-laser beam of 5 W (0.5 mW/pulse) by the optomechanical combination of a dielectric-film coated mirror cube and an electrostatic MEMS scanner platform.\",\"PeriodicalId\":402931,\"journal\":{\"name\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2008.4607833\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607833","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A high-power handling MEMS optical scanner for display applications
This paper reports a design and fabrication technique of high-power handling MEMS (micro electro mechanical systems) optical scanner for laser 3D image display application. The MEMS scanner is designed to control the reflection of high-power YAG-laser beam of 5 W (0.5 mW/pulse) by the optomechanical combination of a dielectric-film coated mirror cube and an electrostatic MEMS scanner platform.