D. Dubuc, K. Grenier, L. Rabbia, A. Tackac, M. Saadaoui, P. Pons, P. Caudrillier, O. Pascal, H. Aubert, H. Baudrand, J. Tao, P. Combes, J. Graffeuil, R. Plana
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MEMS and NEMS technologies for wireless communications
This paper presents a new family of components based on the MEMS and NEMS (nano-electromechanical system) concepts. They show very attractive properties for future wireless communications systems. The design of such components involves both electromagnetic simulations and mechanical and thermal modelling in order to get an accurate description of their electrical behavior.
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