倒装片导电胶粘剂(ECA)互连的红外固化

Romaric Kabre, D. Danovitch, V. Oberson, Magali Cote
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引用次数: 0

摘要

提出了一种实现CZT器件低温导电胶(ECA)倒装互连的新方法。这种方法利用了CZT对某些红外辐射波长的透明度,以及这种红外辐射对环氧树脂的非热效应。我们确定了适当的条件,如波长,源温度和曝光时间的红外辐射源。一系列实验检查了CZT透明度的程度,包括CZT接触垫的影响。这些结果用于确定适当的固化计划,为选定的ECA候选材料的特点是聚合程度和体积电阻率。本文给出的详细结果表明,与ECA固化温度相比,CZT温度保持显著降低(高达50°C)的能力。此外,以前记录的非导电环氧树脂红外固化的非热效应也被证明适用于ECA材料,从而大大减少了ECA固化时间(与对流固化相比),同时确保了高聚合度(>95%)和低体积电阻率(< 5 mΩ.cm)。事实上,与对流固化相比,在低温下观察到体积电阻率的提高;对这种改进提出了一个假设,并讨论了初步的验证实验。
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Infrared Curing of Flip Chip Electrically Conductive Adhesive (ECA) Interconnections
A novel approach to achieving low temperature electrically conductive adhesive (ECA) flip chip interconnections of CZT device is proposed. This approach exploits CZT transparency to certain IR radiation wavelengths and the non-thermal effects imparted upon epoxies by such IR radiation. We determine appropriate conditions, such as wavelength, source temperature and exposure time of an IR radiation source. A series of experiments examine the extent of CZT transparency, including the impact of the CZT contact pads. These results are used to determine appropriate cure schedules for selected ECA candidates as characterized by degree of polymerization and volume resistivity. The detailed results presented in this paper demonstrate the ability to maintain CZT temperature significantly lower (by as much as 50°C) than the ECA cure temperature. Further, non-thermal effects, previously documented for IR curing of non-conductive epoxies, are demonstrated for ECA materials, thereby providing important reductions in ECA cure times (as compared to convection curing) while ensuring a high degree of polymerization (>95%) and low volume resistivity (< 5 mΩ.cm). In fact, improved volume resistivity was observed at low temperatures as compared to convection curing; a hypothesis for this improvement is postulated and preliminary validation experiments discussed.
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