É. Le Quéré, S. Dauzére-Pérés, S. Astie, Cédric Maufront, Xavier Michallet, G. Bugnon, Nicolas Ferrandini
{"title":"计量中跳跃性批次的动态云计算:工业工程","authors":"É. Le Quéré, S. Dauzére-Pérés, S. Astie, Cédric Maufront, Xavier Michallet, G. Bugnon, Nicolas Ferrandini","doi":"10.1109/ASMC.2019.8791790","DOIUrl":null,"url":null,"abstract":"Semiconductor manufacturing is complex and driven by a very strict market in terms of quality, which is ensured by performing many control operations on lots. To reduce the cost of quality, we present a simple algorithm that dynamically cancels lot measurements, i.e. skips lots, that do not bring enough information. The industrial impacts of the algorithm and its implementation in a cloud-based architecture are discussed.","PeriodicalId":287541,"journal":{"name":"2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Dynamic cloud-based computation for skipping lots in metrology : IE : Industrial Engineering\",\"authors\":\"É. Le Quéré, S. Dauzére-Pérés, S. Astie, Cédric Maufront, Xavier Michallet, G. Bugnon, Nicolas Ferrandini\",\"doi\":\"10.1109/ASMC.2019.8791790\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Semiconductor manufacturing is complex and driven by a very strict market in terms of quality, which is ensured by performing many control operations on lots. To reduce the cost of quality, we present a simple algorithm that dynamically cancels lot measurements, i.e. skips lots, that do not bring enough information. The industrial impacts of the algorithm and its implementation in a cloud-based architecture are discussed.\",\"PeriodicalId\":287541,\"journal\":{\"name\":\"2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)\",\"volume\":\"3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-05-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASMC.2019.8791790\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.2019.8791790","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Dynamic cloud-based computation for skipping lots in metrology : IE : Industrial Engineering
Semiconductor manufacturing is complex and driven by a very strict market in terms of quality, which is ensured by performing many control operations on lots. To reduce the cost of quality, we present a simple algorithm that dynamically cancels lot measurements, i.e. skips lots, that do not bring enough information. The industrial impacts of the algorithm and its implementation in a cloud-based architecture are discussed.
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