{"title":"VLSI缺陷/故障分析中缺陷尺寸分布的参数敏感性估计","authors":"M. Blyzniuk, I. Kazymyra","doi":"10.1109/MIEL.2002.1003317","DOIUrl":null,"url":null,"abstract":"The parametric sensitivity of defect size distribution in VLSI defect/fault analysis is evaluated. The use of special software tool FIESTA for the computational experiment aimed at estimation of the significance of parameters in expressions approximating the actual defect distribution is considered. The obtained experimental results and their usefulness have been analysed.","PeriodicalId":221518,"journal":{"name":"2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Estimation of parametric sensitivity for defects size distribution in VLSI defect/fault analysis\",\"authors\":\"M. Blyzniuk, I. Kazymyra\",\"doi\":\"10.1109/MIEL.2002.1003317\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The parametric sensitivity of defect size distribution in VLSI defect/fault analysis is evaluated. The use of special software tool FIESTA for the computational experiment aimed at estimation of the significance of parameters in expressions approximating the actual defect distribution is considered. The obtained experimental results and their usefulness have been analysed.\",\"PeriodicalId\":221518,\"journal\":{\"name\":\"2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-08-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MIEL.2002.1003317\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MIEL.2002.1003317","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Estimation of parametric sensitivity for defects size distribution in VLSI defect/fault analysis
The parametric sensitivity of defect size distribution in VLSI defect/fault analysis is evaluated. The use of special software tool FIESTA for the computational experiment aimed at estimation of the significance of parameters in expressions approximating the actual defect distribution is considered. The obtained experimental results and their usefulness have been analysed.
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