P. Arifin, Sugianto, E. Suprianto, N. Wendri, H. Sutanto, M. Budiman, M. Barmawi
{"title":"等离子体辅助MOCVD生长Al/sub x/Ga/sub 1-x/N","authors":"P. Arifin, Sugianto, E. Suprianto, N. Wendri, H. Sutanto, M. Budiman, M. Barmawi","doi":"10.1109/COMMAD.2002.1237185","DOIUrl":null,"url":null,"abstract":"Thin films Al/sub x/Ga/sub 1-x/N were grown on (0001) sapphire substrates by plasma assisted metal-organic chemical vapor deposition (PA-MOCVD). Plasma-cracked N/sub 2/, trimethylaluminum (TMAl) and trimethylgallium (TMGa) were used as nitrogen, aluminum and gallium sources, respectively. The results of energy dispersive X-ray (EDX) measurements performed at room temperature yielded the linear dependence of molar fraction of Al (x) on molar fraction of vapor phase of TMAl/(TMAl + TMGa). The dependence of the band gap energy on the molar fraction of Al (x) showed quadratic expression, E/sub g/ (x) = 3.35 + 1.55x + 1.3x/sup 2/ eV. Al/sub x/Ga/sub 1-x/N layers with x < 0.34 show n-type conduction with room temperature mobilities in the range of 5 to 10 cm/sup 2//V/spl middot/s, and electron concentrations of 9.0 /spl times/ 10/sup 16/ to 1.4 /spl times/ 10/sup 19/cm/sup -3/.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Growth of Al/sub x/Ga/sub 1-x/N by plasma assisted MOCVD\",\"authors\":\"P. Arifin, Sugianto, E. Suprianto, N. Wendri, H. Sutanto, M. Budiman, M. Barmawi\",\"doi\":\"10.1109/COMMAD.2002.1237185\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Thin films Al/sub x/Ga/sub 1-x/N were grown on (0001) sapphire substrates by plasma assisted metal-organic chemical vapor deposition (PA-MOCVD). Plasma-cracked N/sub 2/, trimethylaluminum (TMAl) and trimethylgallium (TMGa) were used as nitrogen, aluminum and gallium sources, respectively. The results of energy dispersive X-ray (EDX) measurements performed at room temperature yielded the linear dependence of molar fraction of Al (x) on molar fraction of vapor phase of TMAl/(TMAl + TMGa). The dependence of the band gap energy on the molar fraction of Al (x) showed quadratic expression, E/sub g/ (x) = 3.35 + 1.55x + 1.3x/sup 2/ eV. Al/sub x/Ga/sub 1-x/N layers with x < 0.34 show n-type conduction with room temperature mobilities in the range of 5 to 10 cm/sup 2//V/spl middot/s, and electron concentrations of 9.0 /spl times/ 10/sup 16/ to 1.4 /spl times/ 10/sup 19/cm/sup -3/.\",\"PeriodicalId\":129668,\"journal\":{\"name\":\"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)\",\"volume\":\"44 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-12-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/COMMAD.2002.1237185\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.2002.1237185","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Growth of Al/sub x/Ga/sub 1-x/N by plasma assisted MOCVD
Thin films Al/sub x/Ga/sub 1-x/N were grown on (0001) sapphire substrates by plasma assisted metal-organic chemical vapor deposition (PA-MOCVD). Plasma-cracked N/sub 2/, trimethylaluminum (TMAl) and trimethylgallium (TMGa) were used as nitrogen, aluminum and gallium sources, respectively. The results of energy dispersive X-ray (EDX) measurements performed at room temperature yielded the linear dependence of molar fraction of Al (x) on molar fraction of vapor phase of TMAl/(TMAl + TMGa). The dependence of the band gap energy on the molar fraction of Al (x) showed quadratic expression, E/sub g/ (x) = 3.35 + 1.55x + 1.3x/sup 2/ eV. Al/sub x/Ga/sub 1-x/N layers with x < 0.34 show n-type conduction with room temperature mobilities in the range of 5 to 10 cm/sup 2//V/spl middot/s, and electron concentrations of 9.0 /spl times/ 10/sup 16/ to 1.4 /spl times/ 10/sup 19/cm/sup -3/.
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