MIM TaON电容器在ESD HBM脉冲下的电热模型

2008 IEEE International Reliability Physics Symposium Pub Date : 2008-07-09 DOI:10.1109/RELPHY.2008.4558961

M. Verchiani, E. Bouyssou, F. Cantin, C. Anceau, P. Ranson

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引用次数: 1

摘要

本文主要研究金属绝缘体金属TaON电容器的ESD HBM稳健性。提出了一个包含完整泄漏电流描述和热RC网络的电热模型来解释ESD实验结果。泄漏电流描述基于Poole-Frenkel机制和TDDB理论相结合。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Electrothermal model for MIM TaON capacitors during ESD HBM pulses

This work focuses on ESD HBM robustness of metal insulator metal TaON capacitors. An electrothermal model including a complete leakage current description and a thermal RC network is proposed to explain the ESD experimental results. The leakage current description is based on a Poole-Frenkel mechanism combined with a TDDB theory.

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2008 IEEE International Reliability Physics Symposium

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