具有片上时钟发生器的门链结构,可实现真实的高速动应力

N. Shiono, T. Mizusawa
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引用次数: 2

摘要

包含片上频率可变时钟发生器的NAND门链和NOR门链是在实际高速动态应力下评估热电子诱导CMOS性能退化的一种方法。采用同一输入时钟的双门链,通过减去不同阶数的双门链的延迟时间,可以测量栅极延迟时间。在更高的频率和更高的电源电压下操作栅极链会加速热电子引起的电路性能退化,从而为估计正常使用条件下的寿命和实际动态应力提供有用的信息。带有铝互连线负载的铝非与栅极链也适用于估算实际电路中铝线在高频工作和高温下的电迁移失效。
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Gate chain structures with on-chip clock generators for realistic high-speed dynamic stress
NAND and NOR gate chains including on-chip frequency variable clock generators are presented as a way of evaluating hot-electron-induced degradation of CMOS performance under realistic high-speed dynamic stress. Dual gate chains with a common input clock are suitable for measuring net gate delay time by subtracting the delay times of the two chains with different numbers of stages. Operating gate chains at higher frequencies and elevated supply voltages accelerates hot-electron-induced degradation of circuit performance to yield useful information for estimating lifetimes under normal-use conditions and realistic dynamic stress. Aluminum NAND gate chains with aluminum interconnect line loads are also suitable for estimating electromigration failure of aluminum lines in actual circuits through high-frequency operation and elevated temperature.<>
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