半导体制造的准时制方法

M. Levitt, J. Abraham
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引用次数: 11

摘要

提出了一种方法,允许工作车间,如晶圆制造线(晶圆厂),分析应用准时制(JIT)生产方法。从可用的资源和过程配方中,导出了一个看板策略,允许实现拉式生产系统。利用该方法对实例进行了分析,并对JIT/看板策略进行了仿真。仿真结果表明,与其他调度策略相比,该方法具有较好的调度效果。
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Just-in-time methods for semiconductor manufacturing
A method is presented that allows job shops, such as wafer fabrication lines (fabs), to be analyzed for the application of just-in-time (JIT) production methods. From the resources available and the process recipe, a Kanban policy is derived that allows a pull-type production system to be implemented. Using this method example fabs were analyzed and the JIT/Kanban policies derived were simulated. The simulations show that the proposed method performs very well compared to other fab scheduling policies.<>
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