氮化镓的结构缺陷

S. Ruvimov, Z. Liliental-Weber
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引用次数: 0

摘要

利用常规和高分辨电子显微镜研究了纤锌矿结构的外延GaN和块状GaN的缺陷。由于生长条件的不同,外延和块状氮化镓晶体材料的缺陷结构也不同。虽然在块状GaN中通常观察到与沉淀相关的层错和位错环,但在外延GaN层中发现的主要缺陷是位错。叠层断层的形成相当于几个基面上的纤锌矿-锌闪锌矿结构转变,因此相当于局部对称性的改变。
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Structural defects in GaN
Conventional and high resolution electron microscopy has been applied to study defects in both epitaxial and bulk GaN of wurtzite structure. Because of different growth conditions, epitaxial and bulk GaN crystalline materials differ in their defect structures. While stacking faults and dislocation loops associated with precipitates are typically observed in bulk GaN, dislocations are the major defect found in epitaxial GaN layers. Formation of stacking faults is equivalent to a wurtzite-zincblende structural transformation within a few basal planes and, hence, to a local change in symmetry.
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