第14届欧洲微波集成电路会议论文集。高输入功率应力下Ka波段GaN低噪声放大器的退化

X. Tong, Rong Wang, Shiyong Zhang, Jianxing Xu, Penghui Zheng, Fengxiang Chen
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摘要

本文提出了一种22-30 GHz氮化镓(GaN)低噪声放大器(LNA),噪声系数(NF)为0.87-1.51 dB。该LNA采用100 nm栅长AlN/GaN在硅微波单片集成电路(MMIC)上制备。线性增益为14-17 dB,整个频带的输入/输出回波损耗超过10 dB。为了研究LNA的鲁棒性,在LNA的输入端口上施加了27 GHz的1瓦特连续波(CW)。结果表明,应力作用后,增重降低,NF升高。通过实验研究和第一性原理计算探讨了这些降解的物理机制,结果表明,GaN通道中VGaH3配合物脱氢导致增益降低,氮化铝(AlN)势垒中VAl-H4的产生导致NF增加。
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Proceedings of the 14th European Microwave Integrated Circuits Conference Degradation of Ka band GaN Low-Noise Amplifier under High Input Power Stress
A 22-30 GHz gallium nitride (GaN) low-noise amplifier (LNA) with a noise Figure (NF) of 0.87-1.51 dB is presented in this work. This LNA was fabricated with 100 nm gate-length AlN/GaN on silicon (Si) microwave monolithic integrated circuit (MMIC) process. The linear gain is 14-17 dB with input/output return loss over 10 dB across the band. To investigate the robustness of this LNA, 1 Watt continuous wave (CW) at 27 GHz was stressed on the input port of LNA. The decrease of gain and increase of NF were found after stress. Experimental research and first-principles calculations were carried out to investigate the physical mechanism of theses degradations, which indicate that the dehydrogenation of VGaH3 complexes in GaN channel caused the decrease of gain and the creation of VAl-H4 in the aluminum nitride (AlN) barrier caused the increase of NF.
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