{"title":"MOCVD制备GaSb和Al/sub x/Ga/sub 1-x/Sb层及其性能","authors":"A. H. Ramelan, K. Drozdowicz-Tomsia, T. Tansley","doi":"10.1109/COMMAD.1998.791690","DOIUrl":null,"url":null,"abstract":"A study of structural, electrical and optical properties of GaSb and Al/sub x/Ga/sub 1-x/Sb (0.05/spl les/x/spl les/0.25) grown by metalorganic chemical vapour deposition on GaAs, GaSb and Ge substrates using TMAl, TMGa, and TMSb is reported. The optimum growth window established for GaSb growth (temperature 540/spl deg/C and V/III=0.72) is significantly different from optimal growth parameters for AlGaSb layers. Higher V/III ratios and higher temperatures are required to protect the surface morphology of AlGaSb. All Al/sub x/Ga/sub 1-x/Sb in the investigated composition range 0.05/spl les/x/spl les/0.25 were grown at 580/spl deg/C and 800/spl deg/C and V/III ratio=3 and are characterized by excellent, smooth morphology, very high optical transmission and electrical parameters comparable with the best reported for this type of layer.","PeriodicalId":300064,"journal":{"name":"1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Growth and properties of GaSb and Al/sub x/Ga/sub 1-x/Sb layers by MOCVD\",\"authors\":\"A. H. Ramelan, K. Drozdowicz-Tomsia, T. Tansley\",\"doi\":\"10.1109/COMMAD.1998.791690\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A study of structural, electrical and optical properties of GaSb and Al/sub x/Ga/sub 1-x/Sb (0.05/spl les/x/spl les/0.25) grown by metalorganic chemical vapour deposition on GaAs, GaSb and Ge substrates using TMAl, TMGa, and TMSb is reported. The optimum growth window established for GaSb growth (temperature 540/spl deg/C and V/III=0.72) is significantly different from optimal growth parameters for AlGaSb layers. Higher V/III ratios and higher temperatures are required to protect the surface morphology of AlGaSb. All Al/sub x/Ga/sub 1-x/Sb in the investigated composition range 0.05/spl les/x/spl les/0.25 were grown at 580/spl deg/C and 800/spl deg/C and V/III ratio=3 and are characterized by excellent, smooth morphology, very high optical transmission and electrical parameters comparable with the best reported for this type of layer.\",\"PeriodicalId\":300064,\"journal\":{\"name\":\"1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140)\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-12-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/COMMAD.1998.791690\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.1998.791690","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Growth and properties of GaSb and Al/sub x/Ga/sub 1-x/Sb layers by MOCVD
A study of structural, electrical and optical properties of GaSb and Al/sub x/Ga/sub 1-x/Sb (0.05/spl les/x/spl les/0.25) grown by metalorganic chemical vapour deposition on GaAs, GaSb and Ge substrates using TMAl, TMGa, and TMSb is reported. The optimum growth window established for GaSb growth (temperature 540/spl deg/C and V/III=0.72) is significantly different from optimal growth parameters for AlGaSb layers. Higher V/III ratios and higher temperatures are required to protect the surface morphology of AlGaSb. All Al/sub x/Ga/sub 1-x/Sb in the investigated composition range 0.05/spl les/x/spl les/0.25 were grown at 580/spl deg/C and 800/spl deg/C and V/III ratio=3 and are characterized by excellent, smooth morphology, very high optical transmission and electrical parameters comparable with the best reported for this type of layer.
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