基于翘曲和分层传播分析的集成基板优化设计

Hurang Hua, S.K. Sitaramanb
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引用次数: 1

摘要

佐治亚理工学院正在开发下一代封装概念“系统上封装(SOP)”。SOP的核心是一个完全集成的衬底,具有超高密度布线,埋设电容器,电感器,电阻和光电层。在制造过程中以及在工作条件下,由于温度梯度和不同组成材料之间的CTE不匹配,SOP基板可能会产生严重的翘曲和应力。对于SOP集成基板,正在考虑五种材料作为基板的候选材料,薄膜层将在其上依次进行加工。这些候选基板材料有玻璃环氧复合材料FR-4、陶瓷布/FR-4树脂(陶瓷/FR-4)、碳布+碳填料/FR-4树脂(碳/FR-4)、碳布/氰酸酯树脂(碳/氰酸酯)和金属基复合材料AlSiC。在本研究中,对这五种候选基板材料的SOP基板的热机械可靠性进行了评估。研究的重点是热冲击作用下SOP衬底翘曲和疲劳层间脱层扩展。结果表明,翘曲量与热载荷成正比。并对衬底中有无硅倒装芯片进行了比较研究。研究表明,无论是否添加倒装芯片组件,SOP衬底都不会发生分层扩展,但在热冲击下,所有衬底都存在潜在的疲劳裂纹扩展。并对SOP基板在-550℃~ 1250℃和-450℃~ 1200℃两种热冲击下的性能进行了对比研究。本工作的分析结果可用于SOP基板的优化设计。
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Optimal design of an integrated substrate based on the analysis of warpage and delamination propagation
A next-generation packaging concept, "System-On-Package (SOP)", is being developed at Georgia Tech. At the heart of the SOP is a fully integrated substrate with ultra high-density wiring, buried capacitor, inductor, resistor and optoelectronic layers on top of a base substrate. During fabrication as well as under working conditions, severe warpage and stresses could arise in the SOP substrate due to the temperature gradients and the CTE mismatch among its different constituent materials. For the SOP integrated substrate, five materials are being considered as the candidate material for the base substrate on which thin film layers will be sequentially processed. These candidate base substrate materials are glass-epoxy composites FR-4, Ceramic cloth/FR-4 resin (Ceramic/FR-4), Carbon cloth+Carbon filler/FR-4 resin (Carbon/FR-4), Carbon cloth/Cyanate easter resin (Carbon/Cyanate), and metal matrix composites AlSiC. In this study, the thermo-mechanical reliability of the SOP substrate with these five candidate base substrate materials is evaluated. The focus of the research is on the SOP substrate warpage and fatigue interlayer delamination propagation under thermal shock. It is found that the warpage is directly proportional to the thermal load. A comparison study of the substrate with and without a silicon flip-chip assembly is also conducted. The study shows that there will be no delamination propagation for the SOP substrate both with and without a flip-chip assembly, however, a potential fatigue crack growth exists for all the substrates under the thermal shock. A comparison study of the SOP substrate under the two thermal shocks of -550C to 1250C and of -450C to 1200C is also made. The analysis results in this work may be used in optimal design of the SOP substrate.
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