Development of MEMS Structures for Miniature Organic Rankine Cycle System

This paper proposes a MEMS (Micro Electro Mechanical Systems) turbine as an organic Rankine cycle (ORC) system for an IoT (Internet of Things) edge device. The developing turbine shows millimeter scale, and it employs a low-boiling-point material as a working fluid. Therefore, this ORC system can harvest the low temperature waste heat energy. The developed MEMS turbine showed power generation with a winding wire 3-phase coil. When the heating temperature was 80 degree Celsius, the pressure was 0.28 MPa, the rotational speed was 109,090 rpm. The maximum output power was 968.5 micro VA when a load resistance was 0.5 ohm at each coil.